THE GROWTH, STRUCTURE, AND ELECTRICAL TRANSPORT PROPERTIES OF MOLYBDENUM/TANTALUM SUPERLATTICES.
We use high rate magnetically-confined-plasma-triode sputtering guns in a diffusion pumped vacuum chamber to fabricate metal-metal superlattices. By feedback control of the sputtering rates and microprocessor control of the substrate rotation the individual layer thicknesses were kept constant to wi...
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| Language: | en |
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The University of Arizona.
1985
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| Online Access: | http://hdl.handle.net/10150/188086 http://arizona.openrepository.com/arizona/handle/10150/188086 |