Extending the measurement range of an optical surface profiler.
This dissertation investigates a method for extending the measurement range of an optical surface profiling instrument. The instrument examined in these experiments is a computer-controlled phase-modulated interference microscope. Because of its ability to measure surfaces with a high degree of vert...
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| Language: | en |
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The University of Arizona.
1988
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| Online Access: | http://hdl.handle.net/10150/184531 |