Design and Metrology of a Precision XY Planar Stage
In recent years, the manufacturing industry has seen an increase in demand for micro-components in biomedical, opto-mechatronics, and automotive applications. Traditional machine tools are no longer a viable solution to meet the tolerances required by the customers. Hence, new ultra-precision machin...
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| Language: | en |
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2010
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| Online Access: | http://hdl.handle.net/10012/5029 |