Electrical studies on ion-etched n-GaAs(100) surfaces
<p>The major objective of this thesis was to evaluate electrically the damage caused by a low energy (< 4keV) Ar<sup>+</sup> bombardment on n-GaAs(100) surfaces. Electrical measurements were performed on Schottlky diodes formed on the virgin and the ion-etched surfaces.</...
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Virginia Tech
2014
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| Online Access: | http://hdl.handle.net/10919/45915 http://scholar.lib.vt.edu/theses/available/etd-11202012-040231/ |