Preparation and characterization of Mo/Al layered thin films
<p>The fabrication of bilayer and multilayer Mo/Al thin films using a conventional multi-target rf-diode sputter deposition system was studied. The films were deposited on glass and Si( 100) substrates. The as-deposited films were charactexized with respect to their structure and composition p...
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Virginia Tech
2014
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| Online Access: | http://hdl.handle.net/10919/40953 http://scholar.lib.vt.edu/theses/available/etd-02062013-040159/ |