A Manufacturing Process for Single Micron Resolution Optical Gratings Used in X-ray Computed Tomography

• Main Author: Hand, Davis Kyle
• Other Authors: Electrical and Computer Engineering
• Format: Others
• Published: Virginia Tech 2014
• Subjects: Computed Tomography; Photolithography; Electroplating; DRIE
• Online Access: http://hdl.handle.net/10919/33804; http://scholar.lib.vt.edu/theses/available/etd-06282011-131050/

X-ray Computed Tomography (CT) is a process that produces three-dimensional x-ray images, allowing for better diagnosis and analysis of complex internal medical conditions. New advances in the optical techniques used in this process promise to produce better results while reducing patient risk. One of these developments calls for precise optical gratings that can be expensive and difficult to manufacture. This paper presents a simple process developed specifically for the production of these gratings using cost effective techniques. The process uses well understood semiconductor fabrication steps including oxidation, deep reactive ion etching and electroplating. While not entirely successful, the process presented within provides a proof of concept for development of the gratings and discusses improvements that could be made to allow for success. === Master of Science