Advanced lithographic patterning technologies: materials and processes

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Bibliographic Details
Main Author:	Taylor, James Christopher
Format:	Others
Language:	English
Published:	2008
Subjects:	Lithography Photoresists Photonic crystals
Online Access:	http://hdl.handle.net/2152/3040

id	ndltd-UTEXAS-oai-repositories.lib.utexas.edu-2152-3040
record_format	oai_dc
spelling	ndltd-UTEXAS-oai-repositories.lib.utexas.edu-2152-30402015-09-20T16:51:37ZAdvanced lithographic patterning technologies: materials and processesTaylor, James ChristopherLithographyPhotoresistsPhotonic crystalsNot availabletext2008-08-28T23:23:49Z2008-08-28T23:23:49Z20072008-08-28T23:23:49ZThesiselectronicb68669343http://hdl.handle.net/2152/3040166395621engCopyright is held by the author. Presentation of this material on the Libraries' web site by University Libraries, The University of Texas at Austin was made possible under a limited license grant from the author who has retained all copyrights in the works.
collection	NDLTD
language	English
format	Others
sources	NDLTD
topic	Lithography Photoresists Photonic crystals
spellingShingle	Lithography Photoresists Photonic crystals Taylor, James Christopher Advanced lithographic patterning technologies: materials and processes
description	Not available === text
author	Taylor, James Christopher
author_facet	Taylor, James Christopher
author_sort	Taylor, James Christopher
title	Advanced lithographic patterning technologies: materials and processes
title_short	Advanced lithographic patterning technologies: materials and processes
title_full	Advanced lithographic patterning technologies: materials and processes
title_fullStr	Advanced lithographic patterning technologies: materials and processes
title_full_unstemmed	Advanced lithographic patterning technologies: materials and processes
title_sort	advanced lithographic patterning technologies: materials and processes
publishDate	2008
url	http://hdl.handle.net/2152/3040
work_keys_str_mv	AT taylorjameschristopher advancedlithographicpatterningtechnologiesmaterialsandprocesses
_version_	1716820393065447424

Advanced lithographic patterning technologies: materials and processes

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