Advanced materials for block copolymer lithography
The multi-billion dollar per year lithography industry relies on the fusion of chemistry, materials science, and engineering to produce technological innovations that enable continual improvements in the speed and storage density of microelectronic devices. A critical prerequisite to improving the c...
| Main Author: | |
|---|---|
| Format: | Others |
| Published: |
2014
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/2152/25126 |