Stress-Strain Management of Heteroepitaxial Polycrystalline Silicon Carbide Films
Silicon carbide (SiC) is one of the hardest known materials and is also, by good fortune, a wide bandgap semiconductor. While the application of SiC for high-temperature and high-power electronics is fairly well known, its utility as a highly robust, chemically-inert material for microelectrical me...
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| Format: | Others |
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Scholar Commons
2011
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| Online Access: | http://scholarcommons.usf.edu/etd/3211 http://scholarcommons.usf.edu/cgi/viewcontent.cgi?article=4406&context=etd |