Nanostructure morphology variation modeling and estimation for nanomanufacturing process yield improvement

Nanomanufacturing is critical to the future growth of U.S. manufacturing. Yet the process yield of current nanodevices is typically 10% or less. Particularly in nanomaterials growth, there may exist large variability across the sites on a substrate, which could lead to variability in properties. Ess...

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Bibliographic Details
Main Author: Liu, Gang
Format: Others
Published: Scholar Commons 2009
Subjects:
Online Access:http://scholarcommons.usf.edu/etd/2064
http://scholarcommons.usf.edu/cgi/viewcontent.cgi?article=3063&context=etd

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