Nanostructure morphology variation modeling and estimation for nanomanufacturing process yield improvement
Nanomanufacturing is critical to the future growth of U.S. manufacturing. Yet the process yield of current nanodevices is typically 10% or less. Particularly in nanomaterials growth, there may exist large variability across the sites on a substrate, which could lead to variability in properties. Ess...
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| Format: | Others |
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Scholar Commons
2009
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| Online Access: | http://scholarcommons.usf.edu/etd/2064 http://scholarcommons.usf.edu/cgi/viewcontent.cgi?article=3063&context=etd |