Synthesis of Nanoscale Structures in Single Crystal Silicon Carbide by Electron Beam Lithography
Nanostructures were formed on diced specimens of several silicon carbide polytypes and silicon using electron beam lithography. A general introduction to nanostructure synthesis and electron beam lithography,are presented. A scanning electron microscope was retrofitted with a commercially available...
| Main Author: | |
|---|---|
| Format: | Others |
| Published: |
Scholar Commons
2004
|
| Subjects: | |
| Online Access: | https://scholarcommons.usf.edu/etd/960 https://scholarcommons.usf.edu/cgi/viewcontent.cgi?article=1959&context=etd |