Low Temperature Hermetically Sealed 3-D MEMS Device for Wireless Optical Communication
Novel processes were developed that resulted in a self-packaged device during the system integration, along with a transparent lid for inspection or optical probing. A new process was developed for improving the verticality in Micro Electro Mechanical Systems (MEMS) structures using Deep Reactive Io...
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Scholar Commons
2007
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| Online Access: | https://scholarcommons.usf.edu/etd/593 https://scholarcommons.usf.edu/cgi/viewcontent.cgi?article=1592&context=etd |