Electrostatically actuated LIGA-MEMS structures with high aspect ratio beams for RF applications and mechanical property extraction

Electrostatically actuated LIGA-MEMS structures with high aspect ratio beams for RF applications and mechanical property extraction

Microelectromechanical systems (MEMS) devices have been increasing in popularity for radio frequency (RF) and microwave communication systems due to the ability of MEMS devices to improve the performance of these circuits and systems. This interdisciplinary field combines the aspects of lithographic...

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Bibliographic Details
Other Authors: Klymyshyn, David M.
Language:English
Published: 2014
Subjects:
varactor
microwave
radio frequency (RF)
microelectromechanical systems (MEMS)
LIGA
X-ray lithography
high aspect ratio
actuator
electrostatic
material properties
finite element analysis (FEA)
Online Access:http://hdl.handle.net/10388/ETD-2012-09-727

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