Theoretical modelling of thin film growth in the B-N system
In vapour phase deposition, the knowledge and control of homogeneous and heterogeneous reactions in connection to precursor design may lead to the deposition of the desired material; structure or phase. This thesis is a document attempting to increase the knowledge of film growth in the B-N system....
Main Author: | Mårlid, Björn |
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Format: | Doctoral Thesis |
Language: | English |
Published: |
Uppsala universitet, Institutionen för materialkemi
2001
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Subjects: | |
Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-678 http://nbn-resolving.de/urn:isbn:91-554-5048-2 |
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