Microfabrication of miniature x-ray source and x-ray refractive lens
In several x-ray related areas there is a need for high-precision elements for x-ray generation and focusing. An elegant way of realizing x-ray related elements with high precision and low surface roughness is by the use of microfabrication; a combination of semiconductor processing techniques and m...
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| Format: | Doctoral Thesis |
| Language: | English |
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Uppsala universitet, Institutionen för materialvetenskap
2002
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| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-3099 http://nbn-resolving.de/urn:isbn:91-554-5490-9 |