Electroacoustic evaluation of thin film piezoelectric resonators for frequency control and sensing applications

• Main Author: Liljeholm, Lina
• Format: Others
• Language: English
• Published: Linköpings universitet, Institutionen för teknik och naturvetenskap 2005
• Online Access: http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-97876

Electroacoustic evaluation and characterization of thin film electroacoustic resonators operating in the low GHz frequency range has been performed. The measurements have been carried out with a network analyser and model parameters extractions have been performed with both ADS and MATLAB. This study includes evaluation of three equivalent circuit models of the resonators using two different extraction methods of the circuit parameters. Further, the characterization includes evaluation of a resonating biochemical sensor noise performance, as well as its short time stability as a function of various network analyser parameters. The latter include the intermediate frequency bandwidth and the sweep time of network analyser, for which optimal settings for further measurements have been found. Further, it is shown that the resonators have an high Quality factor, which together with the high frequency of operation yield an extremely high mass sensitivity. Finally, the resolution of the resonant sensors is estimated to be approximately up to 5 times better than the resolution of commercially available biosensors, when operated in liquid media.