Cathodic Arc Synthesis of Ti-Si-C-N Thin Films : Plasma Analysis and Microstructure Formation
This Thesis explores the arc deposition process and films of Ti-Si-C-N, inspired by the two ternary systems Ti-Si-N and Ti-C-N, both successfully applied as corrosion and wear resistant films. The correlation between cathode, plasma, and film properties are studied for a comprehensive view on film f...
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| Format: | Doctoral Thesis |
| Language: | English |
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Linköpings universitet, Tunnfilmsfysik
2013
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| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-86259 http://nbn-resolving.de/urn:isbn:978-91-7519-714-2 |