Synthesis of Carbon-based and Metal-Oxide Thin Films using High Power Impulse Magnetron Sputtering
The work presented in this thesis deals with synthesis of carbon-based as well as metal-oxide thin films using highly ionized plasmas. The principal deposition method employed was high power impulse magnetron sputtering (HiPIMS). The investigations on plasma chemistry, plasma energetics, plasma-film...
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| Format: | Doctoral Thesis |
| Language: | English |
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Linköpings universitet, Plasma och beläggningsfysik
2014
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| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-104265 http://nbn-resolving.de/urn:isbn:978-91-7519-408-0 (print) |