Termination and passivation of Silicon Carbide Devices.

Silicon carbide rectifiers are commercially available since 2001, and MESFET switches are expected to enter the market within a year. Moreover, three inch SiC wafers can be purchased nowadays without critical defects for the device performance and four inch substrate wafers are announced for the yea...

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Bibliographic Details
Main Author: Wolborski, Maciej
Format: Others
Language:English
Published: KTH, Mikroelektronik och Informationsteknik, IMIT 2005
Subjects:
SiC
Online Access:http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-439