Termination and passivation of Silicon Carbide Devices.
Silicon carbide rectifiers are commercially available since 2001, and MESFET switches are expected to enter the market within a year. Moreover, three inch SiC wafers can be purchased nowadays without critical defects for the device performance and four inch substrate wafers are announced for the yea...
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Format: | Others |
Language: | English |
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KTH, Mikroelektronik och Informationsteknik, IMIT
2005
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Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-439 |