Silicon nanowires, nanopillars and quantum dots : Fabrication and characterization
Semiconductor nanotechnology is today a very well studied subject, and demonstrations of possible applications and concepts are abundant. However, well-controlled mass-fabrication on the nanoscale is still a great challenge, and the lack of nanofabrication methods that provide the combination of req...
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| Format: | Doctoral Thesis |
| Language: | English |
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KTH, Mikroelektronik och Informationsteknik, IMIT
2005
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| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-420 |