Plasma characterization of a high power impulse magnetron experiment
Main Author: | Hasbum, Moises |
---|---|
Format: | Others |
Language: | English |
Published: |
KTH, Skolan för elektro- och systemteknik (EES)
2014
|
Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-199378 |
Similar Items
-
Fundamentals of High Power Impulse Magnetron Sputtering
by: Böhlmark, Johan
Published: (2006) -
Study on the plasma characterization for metal target and the properties of TiN coating by high power impulsed magnetron sputtering
by: Hsiao-Ku Shih, et al.
Published: (2013) -
High power impulse magnetron sputtering (HIPIMS) : fundamental plasma studies and material synthesis
by: Hecimovic, Ante
Published: (2009) -
Modeling High Power Impulse Magnetron Sputtering Discharges
by: Huo, Chunqing
Published: (2012) -
Measurement setup for High Power Impulse Magnetron Sputtering
by: Sveinsson, Ólafur Björgvin
Published: (2011)