Heterogeneous material integration for MEMS
This thesis describes heterogeneous integration methods for the fabrication of microelectromechanical systems (MEMS). Most MEMS devices reuse the fabrication techniques that are found in the microelectronics integrated circuit industry. This limits the selection of materials and processes that are f...
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| Format: | Doctoral Thesis |
| Language: | English |
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KTH, Mikro- och nanosystemteknik
2013
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| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-129185 |