Development of ultra-precision tools for metrology and lithography of large area photomasks and high definition displays

Development of ultra-precision tools for metrology and lithography of large area photomasks and high definition displays

Large area flat displays are nowadays considered being a commodity. After the era of bulky CRT TV technology, LCD and OLED have taken over as the most prevalent technologies for high quality image display devices. An important factor underlying the success of these technologies has been the developm...

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Bibliographic Details
Main Author: Ekberg, Lars Peter
Format: Doctoral Thesis
Language:English
Published: KTH, Mätteknik och optik 2013
Subjects:
Ultra precision 2D metrology
LCD-display
OLED-display
nm-resolution
random phase measurement
large area
photomask
acousto-optic deflection
self-calibration
Z-correction
absolute accuracy
uncertainty.
Online Access:http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-122264
http://nbn-resolving.de/urn:isbn:978-91-7501-768-6

Internet

http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-122264
http://nbn-resolving.de/urn:isbn:978-91-7501-768-6

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