Cryogenic Etching of the Electroplating Mold for Improved Zone Plate Lenses
The fabrication of zone plate lenses that are used for focusing X-rays relies on nanofabrication techniques such as e-beam lithography, reactive ion etching, and electroplating. The circular grating-like zone plate pattern can have a smallest half-period, a so-called zone width, of down to 20 nm whi...
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| Format: | Others |
| Language: | English |
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KTH, Tillämpad fysik
2010
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| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-12109 |