Novel micromechanical bulk acoustic wave resonator sensing concepts for advanced atomic force microscopy
This thesis investigates novel concepts of micromechanical bulk acoustic wave sensors for advanced atomic force microscopy (AFM), using micromachined silicon resonators, which are analyzed with regard to their performance as compared to conventional AFM sensors. Conventional AFM systems use a cantil...
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| Format: | Others |
| Language: | English |
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KTH, Mikro- och nanosystemteknik
2012
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| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-117739 |