Omega System Kalibrering: Strål X-Separation mätning och kalibrering
Micronic Laser Systems AB produces and develops machines for the photo mask production market. One of their products is the Omega machine which exposes photo masks using 5 laser beams simultaneously. It is important that the distance between the each laser beam, the x-separation, is the same. The x-...
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| Format: | Others |
| Language: | Swedish |
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KTH, Maskinkonstruktion (Inst.)
2006
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| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-101202 |