Methods for verification of ultra-pure water with air gap membrane distillation : Focusing on applications in the semiconductor industry
In the semiconductor industry, the purification process of the silicon wafers is of a great importance. If water of sufficient quality is not used, the silicon wafer surface runs a risk of being destroyed by particles and bacteria sticking to its surface. Semiconductors cannot be manufactured on the...
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| Format: | Others |
| Language: | English |
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Karlstads universitet, Fakulteten för hälsa, natur- och teknikvetenskap (from 2013)
2020
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| Subjects: | |
| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:kau:diva-80018 |
