Optical Lithography Simulation using Wavelet Transform
Optical lithography is an indispensible step in the process flow of Design for Manufacturability (DFM). Optical lithography simulation is a compute intensive task and simulation performance, or lack thereof can be a determining factor in time to market. Thus, the efficiency of lithography simulation...
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| Format: | Others |
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ScholarWorks@UMass Amherst
2010
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| Online Access: | https://scholarworks.umass.edu/theses/412 https://scholarworks.umass.edu/cgi/viewcontent.cgi?article=1495&context=theses |