Phase Behavior of Block Copolymers in Compressed CO2 and as Single Domain-Layer, Nanolithographic Etch Resists For Sub-10 nm Pattern Transfer
Diblock copolymers have many interesting properties, which first and foremost include their ability to self-assemble into various ordered, regularly spaced domains with nanometer-scale feature sizes. The work in this dissertation can be logically divided into two parts - the first and the majority o...
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ScholarWorks@UMass Amherst
2011
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| Online Access: | https://scholarworks.umass.edu/open_access_dissertations/422 https://scholarworks.umass.edu/cgi/viewcontent.cgi?article=1431&context=open_access_dissertations |