| Summary: | By relying on semiconductor lithography and processing techniques, I have fabricated a
flat, precision aligned CCD mosaic for astronomical uses, and other imaging applications
where large, flat focal planes are important. Modifications to the lithographic techniques
used in micromachining lead to a significant reduction in various residue deposits, allowing
a smooth surface suitable for CCD alignment. Details of the technique and the
fabrication of a prototype mosaic are described. The composite device is flat to within
± 5 //m, with rows/columns oriented to within 20 ppm. The use of an existing technology
with built in precision reduces many of the difficulties and expenses typically encountered
with mosaic detector construction. Imaging with a prototype camera confirms the accuracy
of alignment. Applications for the 5 meter liquid mirror telescope (LMT) are
considered, using the mosaic in time-delay and integrate (TDI) mode. === Science, Faculty of === Physics and Astronomy, Department of === Graduate
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