Partial differential equations of electrostatic MEMS
Micro-Electromechanical Systems (MEMS) combine electronics with micro-size mechanical devices in the process of designing various types of microscopic machinery, especially those involved in conceiving and building modern sensors. Since their initial development in the 1980s, MEMS has revolutionized...
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| Language: | English |
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University of British Columbia
2011
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| Online Access: | http://hdl.handle.net/2429/31315 |