Gallium arsenide materials and device fabrications

The purpose of this work was to study certain aspects of device fabrication and material properties of ion implanted MESFETs in semi-insulating LEC GaAs. The fabrication technology and materials properties of GaAs are presently the chief limitations in the way of application of GaAs ion-implanted de...

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Bibliographic Details
Main Author: Tan, Kim Wah
Language:English
Published: University of British Columbia 2010
Online Access:http://hdl.handle.net/2429/26332