Mechanisms of voltage controlled reactive sputtering and physical properties of reactively sputtered cermet films
This thesis deals with the mechanisms involved in reactively sputtering a metal target in an Inert/reactive gas glow discharge and with the electrical transport and optical properties of A1/A1N granular metal (or cermet) films produced by this technique. Experiments are described in which an A1 targ...
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| Language: | English |
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University of British Columbia
2010
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| Online Access: | http://hdl.handle.net/2429/25259 |