Microsput : a microcomputer operating system for planar magnetron sputtering
A Microcomputer software package was developed to monitor and control the planar magnetron sputtering process, and to record and display data from the process equipment. The system, dubbed MicroSput, was designed to be as flexible as possible, without sacrificing precision of process control or comp...
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| Language: | English |
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2010
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| Online Access: | http://hdl.handle.net/2429/23401 |