Microsput : a microcomputer operating system for planar magnetron sputtering
A Microcomputer software package was developed to monitor and control the planar magnetron sputtering process, and to record and display data from the process equipment. The system, dubbed MicroSput, was designed to be as flexible as possible, without sacrificing precision of process control or comp...
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| Language: | English |
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2010
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| Online Access: | http://hdl.handle.net/2429/23401 |
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ndltd-UBC-oai-circle.library.ubc.ca-2429-23401 |
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ndltd-UBC-oai-circle.library.ubc.ca-2429-234012018-01-05T17:42:11Z Microsput : a microcomputer operating system for planar magnetron sputtering McMahon, Richard William A Microcomputer software package was developed to monitor and control the planar magnetron sputtering process, and to record and display data from the process equipment. The system, dubbed MicroSput, was designed to be as flexible as possible, without sacrificing precision of process control or comprehensiveness of operations performed. MicroSput was successfully employed to provide plasma voltage control, which in turn allowed unprecedented investigations of the of the planar magnetron sputtering process. Science, Faculty of Physics and Astronomy, Department of Graduate 2010-04-13T15:18:59Z 2010-04-13T15:18:59Z 1982 Text Thesis/Dissertation http://hdl.handle.net/2429/23401 eng For non-commercial purposes only, such as research, private study and education. Additional conditions apply, see Terms of Use https://open.library.ubc.ca/terms_of_use. |
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NDLTD |
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English |
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NDLTD |
| description |
A Microcomputer software package was developed to monitor and control the planar magnetron sputtering process, and to record and display data from the process equipment. The system, dubbed MicroSput, was designed to be as flexible as possible, without sacrificing precision of process control or comprehensiveness of operations performed. MicroSput was successfully employed to provide plasma voltage control, which in turn allowed unprecedented investigations of the of the planar magnetron sputtering process. === Science, Faculty of === Physics and Astronomy, Department of === Graduate |
| author |
McMahon, Richard William |
| spellingShingle |
McMahon, Richard William Microsput : a microcomputer operating system for planar magnetron sputtering |
| author_facet |
McMahon, Richard William |
| author_sort |
McMahon, Richard William |
| title |
Microsput : a microcomputer operating system for planar magnetron sputtering |
| title_short |
Microsput : a microcomputer operating system for planar magnetron sputtering |
| title_full |
Microsput : a microcomputer operating system for planar magnetron sputtering |
| title_fullStr |
Microsput : a microcomputer operating system for planar magnetron sputtering |
| title_full_unstemmed |
Microsput : a microcomputer operating system for planar magnetron sputtering |
| title_sort |
microsput : a microcomputer operating system for planar magnetron sputtering |
| publishDate |
2010 |
| url |
http://hdl.handle.net/2429/23401 |
| work_keys_str_mv |
AT mcmahonrichardwilliam microsputamicrocomputeroperatingsystemforplanarmagnetronsputtering |
| _version_ |
1718592290842214400 |