Fabricating silicon mesh bolometers for BAM
Silicon membranes have been fabricated and etched into mesh structures using both wet and Cl₂ plasma etching. The most repeatable process involoved wet etching triple bonded wafers with a buried oxide layer. A recipe to build Si meshes, with a grid spacing of 375 μm and leg cross-sections of 5 μm...
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| Format: | Others |
| Language: | English |
| Published: |
2009
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| Online Access: | http://hdl.handle.net/2429/10248 |
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