3D Surface Profiling Measurement Based on PZT Using Binning Method in Microscopy

• Main Authors: Wu, Po-Hsun, 吳柏勳
• Other Authors: Cheng, Pi-Ying
• Format: Others
• Language: zh-TW
• Published: 2019
• Online Access: http://ndltd.ncl.edu.tw/handle/3a8g28

碩士 === 國立交通大學 === 機械工程系所 === 108 === This study uses PZT controllers, microscopes, and CCD cameras in conjunction with image processing resolution algorithms to achieve multiple height image fusion, and to model the surface contour of the object under test and to generate high depth of field images. Generally, the depth of field in the microscopic system is small. If the surface height difference of the object to be tested is large, the image will only be partially clear. Through the focus-focusing algorithm, the sharpness of the image and the output value of the algorithm can be calculated. It will increase as the image becomes clearer, so it is possible to judge whether the image is clear through the focus-focusing algorithm. The advantage of using the multiple image focal length fusion algorithm is that, even in the case of insufficient depth of field, images of different quality can be formed by combining images of different focal lengths. The surface topography measurement method used in this research is passive measurement, so it does not make physical contact with the object to be tested, and can effectively avoid the risk of destroying the object to be tested, and is suitable for use on a vulnerable object to be tested. Through the precise regulation of the PZT controller, we can more effectively obtain images of different heights. Combined with the Binning function, the image capturing speed can be further accelerated, which makes the surface topography more rapid and can also establish high depth of field images faster.