Application of Design of Experiments to Improving Copper Film Uniformity for Panel-Level Electroplating Process - A Case Study of X Company

碩士 === 國立交通大學 === 管理學院工業工程與管理學程 === 108 === Wafer Level Package(WLP), is one of the sections in the semiconductor electric package domain, another developed domain is Panel Level Package(PLP), which having 95% using efficiency of the squared substrate that is very helpful to the productivity improve...

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Bibliographic Details
Main Authors: Tseng, Chien-Chou, 曾建洲
Other Authors: Chang, Yung-Chia
Format: Others
Language:zh-TW
Published: 2019
Online Access:http://ndltd.ncl.edu.tw/handle/6kkt88