| Summary: | 碩士 === 國立雲林科技大學 === 材料科技研究所 === 107 === In this research work, Co40Fe40V20 thin films with various thicknesses in the range of 10-100 nm, sputtered on glass and Si (100) substrates, , were investigated to check the structural and magnetic properties. The structural properties of the sputtered Co40Fe40V20 thin films with various thicknesses on glass or Si (100) substrate were measured via X-ray diffractometer (XRD). The trends and resultsof the Co40Fe40V20 thin films with various thicknesses on glass or Si (100) substrate, measured by 〖 χ〗_ac (Xacquan’Magqu) under different measuring frequencies are analyzed and discussed. Moreover, the magnetic properties (including Ms and Hc parameters) and the DI water or Glycerol-contact angles of the Co40Fe40V20 thin films were measured as a function of thickness by Alternating Gradient Magnetometer (AGM) and the contact angle measuring instrument, respectively.Finally, the optical transmittance of the magnetic Co40Fe40V20 thin films on glass were carried out by the micro-optical measuring instrument.
According to the XRD results, the 10 nm ~ 40 nm-thick Co40Fe40V20 thin films on glass are amorphous. However, the Co40Fe40V20 thin films with thicknesses of 50 nm or larger than 50 nm, have much better crystalline structures. Obviously, the XRD diffraction peak, located at a 2θ angle of 46 degree, indicates the characteristic peak of CoFe(110). Moreover, the Xac of the sputtered Co40Fe40V20 thin films obviously decreases with the increase of the measured frequency in a range of 50 ~ 25000 Hz. Meanwhile, the optimal resonant frequencies of the Co40Fe40V20 thin films on glass or Si(100) substrate were exhibited between 50 Hz and 2000 Hz. Then, based on the measured results of the magnetic properties, the larger coercivity and much better magnetic squarness (the ratio of Mr/Ms) were achieved in the Co40Fe40V20 thin film with a thickness of 60 nm. The ratio of Mr/Ms is around 0.91 or 0.92. All of the measured contact angles are less than 90 degree, suggesting the Co40Fe40V20 thin films are hydrophilic. The critical thickness of the Co40Fe40V20 thin film is 60 nm according to the calculated results of the surface energy. Finally, the largest optical transmittance of the Co40Fe40V20 thin film with a thickness of 10 nm is 28 %, resulted from the thinnest thickness and the smallest grain.
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