Modification of Zinc Oxide Nitrogen-doped Film by Rapid Thermal Annealing
碩士 === 大同大學 === 電機工程學系(所) === 107 === The main purpose of this thesis is to stabilize the nitrogen in the zinc oxide nitrogen-doped film by rapid temperature annealing. We use DC magnetron sputtering to make zinc nitride as a precursor, and prepare zinc oxide nitrogen-doped nitrogen film by micro-ox...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/3g8m8j |