Effect of Pretreatment Methods on the Electron Field Emission Characteristics of the Diamond Films

• Main Authors: Shao-kang Lo, 羅紹剛
• Other Authors: Wen-Ching Shih
• Format: Others
• Language: zh-TW
• Published: 2019
• Online Access: http://ndltd.ncl.edu.tw/handle/8m4vv7

碩士 === 大同大學 === 電機工程學系(所) === 107 === In this study, firstly we use the spin-coating to spin the mixture of different diamond Ti and titanium powders on the Si substrates, and then the samples were annealed by furnace tube.The results show that the samples compsed of black boron diamond (BBD) and μm-sized Ti powders possess the highest conductivity with the turn-on field of 3.2 V/μm and current density of 808.46 μA/cm2 when the applied field was fixed at 8V/μm. In the second part of the thesis, the samples annealed after the furnace annealing were processed by plasma post-treatment, we use three types of plasma(Ar, N2 and Ar first then N2 plasma).The Ar first then N2 plasmas).The Ar first then N2 plasmas show the best electron fild emission (EFE) properties , The samples composed of black boron diamond (BBD) and μm-sized Ti poweders possess the best EFE properties with turn-on field of 2.56 V/μm and current density of 336.52 μA/cm2 when the applied field was fixed at 8V/μm. In the third part of the thesis,we compare different three pre-treatment methods for growing diamond films.Theresults show that the samples with ultrasonication pretreatment possess the best EFE properties. Besides, the EFE properties. Besides, the EFE properties of the samples with spin-coating pretreatment are very close to that of samples with ultrasonication pretreatment, The spin-coating pretreatment is surperior to the ultrasonication pretreatment if we want to grow the diamond films on the fragile and vertical aligned carbon nanotubes (CNTs) or carbon nanowalls (CNWs), because the structure will not be destroyed using spin-coating preatment.