Energy-Saving Strategies and examples for Facility and Process System of High-Tech Fabrication Plants in the past, present and future.

• Main Authors: CHANG, CHENG-KUANG, 張振光
• Other Authors: HU,SHIH-CHENG
• Format: Others
• Language: zh-TW
• Published: 2019
• Online Access: http://ndltd.ncl.edu.tw/handle/865fr5

博士 === 國立臺北科技大學 === 能源與冷凍空調工程系 === 107 === Industrial sector consumes 54% of the total power in Taiwan annually, which is the biggest portion and 37% of it is on electronics manufacturing and the power demand keeps rising. This study investigates the energy consumption patterns and energy-saving potentials in Taiwans electronics fabs, and focuses on the most energy-consuming system, "clean air-conditioning," putting forward several energy-saving strategies. Firstly, the study aim at Taiwans high-tech industry giants, such as wafer fabrication, LCD panel, semiconductor testing & packaging, collecting on-site information and establishing energy consumption indicators to build the most product-relevant energy consumption benchmark in this industry. (Chapter 2) Then, with FCFs (Energy Conversion Factors) and via FES (Fab Energy Simulation software from ISMI), the study validates six energy-saving strategies of clean air-conditioning system with on-site data collected from semiconductor fabs. (Chapter 3) Finally, the study summarizes the energy-saving methods of high-tech fabs and demonstrates the mentioned skills by redesigning the climate unit of processing tool on the site, end up saving 80% of the original annual power consumption: from 16,052,844 kWh/yr down to 3,062,843 kWh/yr. (Chapter 4)