Implementation On Interferometric Signal Processing Techniques And Modules For Nano-Scale Displacement Measurement
碩士 === 國立臺北科技大學 === 自動化科技研究所 === 107 === To develop a compact fiber-based displacement measuring probe for the realization of detection on a nanoscale linear displacement with a range of few hundreds of millimeters, especially for precise positioning in a 3-axis wafer stage. The objective is realize...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/k5eu78 |