Structure and Anti-noise Design and Sensitivity Verification of Piezoelectric Low-frequency Accelerometer
碩士 === 南臺科技大學 === 機械工程系 === 107 === With the pursuit of speed in 3C products, the confidential industry such as semiconductor manufacturing has become increasingly demanding for vibration. Therefore, the predecessors of this laboratory proposed active vibration isolation platform and piezoelectric l...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/393knm |