Monolithic Microwave Heater with Programmable Thermostat Function

• Main Authors: Tzu-Yu Tseng, 曾子宇
• Other Authors: Jenq-Shiou Leu
• Format: Others
• Language: en_US
• Published: 2019
• Online Access: http://ndltd.ncl.edu.tw/handle/e4s3gd

碩士 === 國立臺灣科技大學 === 電子工程系 === 107 === In this thesis, a monolithic microwave heater with programmable thermostat function for thermotherapy is proposed and implemented using TSMC CMOS 0.18-μm 1P6M process. To achieve microwave heating, the heater adopts a 2.4-GHz oscillator to generate the microwave and uses an amplifier with LC resonance load to enhance the signal strength. Moreover, the load inductor of amplifier is used as a heat applicator. The microwave heater is then integrated with temperature sensors, a 11-bit successive-approximation analog-to-digital converter (SAR-ADC) and a digital comparator to achieve the thermostat function. The amplifier, oscillator, temperature sensor and ADC consume the power of 113, 1.4, 0.83, 4.17 mW respectively. According to simulation, the amplifier can achieve the PE/PAE of 18.7 %/17.7 %. The output power of 13.2 dBm can be estimated. The temperature detection range of the temperature sensors is from 10 ℃ to 50 ℃, where the temperature sensitivity of sensors is 47 mV/℃. When the 80-mg muscle mimicking agar phantoms are placed above the inductor, the heater can achieve the programmed temperature increases of 0.5, 1.0 and 1.5 °C with the variation of 0.2 °C. The total power consumption of system is 119 mW.