Design and Development of a Force Measurement System with a Large Measuring Range

• Main Authors: Cheng-Wei Chen, 陳正偉
• Other Authors: 廖先順
• Format: Others
• Language: zh-TW
• Published: 2019
• Online Access: http://ndltd.ncl.edu.tw/handle/dd555u

碩士 === 國立臺灣大學 === 機械工程學研究所 === 107 === Atomic force microscope (AFM) is a precision instrument for measuring the surface physical properties at nanoscale. Because the ability to measure both conductive and nonconducting samples in non-vacuum environment, AFM has been widely used to measure surface morphology and mechanical properties at nanoscale. However, the scan range of common AFMs is usually less than several hundred micrometers, and the sample size is limited and not suitable for large samples such as silicon wafers and display panels. In this thesis, a force measurement system with a large measuring range of 400 mm × 240 mm was developed to measure the sample viscoelasticity by using the force detection method of AFM. Moreover, the homemade human-machine interface is user-friendly and flexible for modification. In the experiments, the adhesion force between the AFM tips and the hydrophilic glass slides was measured. The adhesion force measured by a UV/O_3 surface treated spherical tip was five times larger than that measured by an untreated tip. Besides, the adhesion force between the spherical tip and a glass slide after 10 minutes UV/O_3 treatment is five times larger than the result on an untreated glass slide. This result shows that the adhesion force is positively correlated to the treatment time of sample treatment. This trend is coincident with the results obtained by a commercial AFM.