Mechanical Properties and Oxidation Resistance of Sputtered Cr–Si–N Coatings
碩士 === 國立臺灣海洋大學 === 材料工程研究所 === 107 === In this study, Cr–Si–N coatings were fabricated using reactive direct current magnetron sputtering system. Fixed nitrogen partial pressure N2/(Ar+N2) is 0.5, The Cr target power is 100 W, and the Si target power is changed from 0 to 150 W. Microstructure, phas...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/g2u92k |