A NOx gas sensing based on FTO thin film by MEMS technology
碩士 === 國立臺南大學 === 電機工程學系碩博士班 === 107 === In this thesis, we prepared the gas sensors based on Fluorine doped Tin Oxide (FTO) films with MEMS micro-electro-mechanical technology and the sensors were used to fabricate the device that can perform gas sensing. The F content is ~10 at%. The sensors illus...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/e9nm79 |