Polarization beam splitter is made up of the TSRI U18 process technology by utilizing decouple phenomenon

• Main Authors: CHEN,SHUN-CHENG, 陳舜承
• Other Authors: HSU,CHIH-WEI
• Format: Others
• Language: zh-TW
• Published: 2019
• Online Access: http://ndltd.ncl.edu.tw/handle/266xng

碩士 === 國立臺南大學 === 電機工程學系碩博士班 === 107 === In this paper, a novel polarization splitter is proposed based on the CMOS structure in the TSRI U18 process technology. The symmetrical waveguide directional coupler (DC) is designed by utilizing the decoupling of rib waveguide , so that the TM mode is decoupling , the TE mode can couple by satisfy the phase matching condition at an appropriate waveguide gap due to the same refractive index of symmertrical waveguides；hence the TE and TM modes can achieve separation effect. In order to simulate the designed polarization separator, this paper uses the finite element method to perform the simulation. First, we follow the TSRI U18 process technology. In the etch depth of only two options, in order to ensure the existence of fundamental mode, a poly-Si is selectively deposited, and the polarization separator is designed by changing the width of the waveguide core and the spacing of the waveguide core. So that improve the light transmittance and reduce the bending loss, we use the general waveguide structure at the output and reduce the bending loss by the plate structure, and use the gradual structure to improve the light transmittance. Finally, we fixed the size of the waveguide core by the waveguide core spacing is changed to optimize the processing of the overall component extinction ratio. Numerical simulations show that the present PBS has a high extinction ratio of more than 60 dB, and the device length is 109.43